Automated Critical Point Drying Workstation for MEMS

Automated Critical Point Drying Workstation for MEMS

Model: IAL-MD

The FLOSN IAL-MD is a proposed workstation for drying released MEMS structures and other delicate wafer-based samples. It combines wet cassette loading, controlled transfer, liquid-CO₂ exchange and programmable critical-point drying in a guarded process area. The design emphasizes sample support, solvent retention and traceable process records. Its base wafer format is 100 mm; larger formats require a different pressure chamber and handling configuration.

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FLOSN / PRODUCT FEATURES

Product Features

6 FEATURES

Retained-Solvent Transfer

Cassette handling is designed around maintaining wet conditions before the controlled drying sequence.

Wafer-Specific Fixtures

Defined slots and edge support accommodate the nominated wafer format without gripping released structures.

Programmable Exchange and Venting

Recipes coordinate liquid exchange, thermal conditioning, pressure holds and decompression.

Filtered Process Enclosure

A filtered canopy and cleanable deck support contamination-control development.

Automatic Closure Interlocks

The closure sequence uses pressure-zero confirmation, lid-position sensing and guarded access.

Traceable Wafer Lots

Lot IDs connect cassette identity, recipe revision and pressure/temperature history.

FLOSN / TECHNICAL PARAMETERS

Model & Parameters

SELECTED MODEL

CFD-SA500

Model-specific specifications
Chamber volume
520 mL
Operating pressure
0–2,200 psi
Power consumption
1,500 W
Exhaust flow rate
0–2 SLPM

Chamber & operation

Chamber dimensions · I.D. × depth (mm)
114.3 × 50.8 mm
Chamber dimensions · I.D. × depth (in)
4.5 × 2 in
Operating pressure · MPa
0–15.2 MPa
Maximum safe working pressure
2,500 psi (17.2 MPa)
Heating method
PTC electric heating / cartridge electric heating
Overall dimensions · W × D × H
Not specified
SELECTED MODEL

CFD-SA1000

Model-specific specifications
Chamber volume
1,080 mL
Operating pressure
0–2,200 psi
Power consumption
1,500 W
Exhaust flow rate
0–2 SLPM

Chamber & operation

Chamber dimensions · I.D. × depth (mm)
165.1 × 50.8 mm
Chamber dimensions · I.D. × depth (in)
6.5 × 2 in
Operating pressure · MPa
0–15.2 MPa
Maximum safe working pressure
2,500 psi (17.2 MPa)
Heating method
Cartridge heater heating
Overall dimensions · W × D × H
Not specified
Shared specifications · all models

Materials & pressure safety

Chamber material
SS316L
Optional materials
Hastelloy C276, Inconel 625, Monel 400, Titanium Grade 2, PTFE lining
Pressure safety system
Electronic pressure monitoring combined with mechanical over-pressure relief protection

Environment & utilities

Operating temperature range
−30 to +60 °C
Operating ambient humidity
20%–70% RH, non-condensing
Power supply
120 / 220 V AC, 50–60 Hz
CO₂ gas requirement
High-purity liquid CO₂ supply; recommended purity >99.9%

Cooling, control & filtration

Cooling system
Integrated closed-loop cooling; the internal chiller loop accelerates cooling and reduces CO₂ consumption
Control system
LCD touchscreen; semi-automated control with programmable timer operation and electronic sensor monitoring
Filtration system
Double T-Filter, Cat. No. 8785; two passes through 0.5 μm filters; >99.5% retention

Samples & chemical compatibility

Compatible sample types
Biological specimens, microscopy samples, hydrogels, aerogels, porous materials, polymers, and other structure-sensitive materials
Compatible solvents
CO₂-miscible solvents commonly used in sample preparation, including ethanol, acetone, methanol, and other laboratory solvents
Chemical compatibility warning
Strongly acidic, strongly alkaline, oxidizing, or highly toxic solvents require prior compatibility evaluation before use
Standard configuration & options

Standard configuration

  • High-pressure viewing window chamber
  • Integrated chamber illumination system
  • Integrated condensation and gas-liquid separation system
  • Non-mechanical CO₂ mixing and exchange system
  • Controlled slow filling and venting system
  • Precision vent flow meter
  • Standard stainless steel CO₂ supply line
  • Anti-static exhaust tubing
  • Replacement O-ring seal kit
  • Installation tool kit
  • User operation manual
  • Factory acceptance test report
  • Warranty and technical support

Optional configurations

  • Interchangeable sample holders
  • Custom sample chamber inserts
  • Magnetic stirring module
  • High-temperature / high-pressure chamber customization
  • Corrosion-resistant alloy chamber upgrade
  • Microscopy sample holder kit

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