FLOSN / PRODUCT FEATURES
Product Features
Two Precursor Lines
Separately valved delivery paths support sequential treatments with compatible precursors.
Conditioned Vapour Path
Independent chamber, source and line temperature settings help manage condensation and delivery consistency.
Absolute-Pressure Control
Pressure feedback supports defined exposure and purge stages within the selected vacuum operating range.
Flexible Sample Fixtures
Removable trays accommodate coupons and small three-dimensional samples after access and material checks.
Recipe and Exposure Records
Record temperature, chamber pressure, valve states and exposure duration for process comparisons.
Contained Purge and Exhaust
A dedicated exhaust interface supports compatible trapping and treatment rather than venting process vapour into the enclosure.
